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The thermal and ion-assisted reactions of GaAs(100) with molecular chlorine
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Publications
The thermal and ion-assisted reactions of GaAs(100) with molecular chlorine
The thermal and ion-assisted reactions of GaAs(100) with molecular chlorine
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M. Balooch
M. Balooch
DO
D. R. Olander
D. R. Olander
WS
W. J. Siekhaus
W. J. Siekhaus
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1 July 1986
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 4
(4)
,
794-805
https://doi.org/10.1116/1.583558
Abstract
No abstract available
Cited
Cited by 94 articles
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