Sputtering yield and morphological changes of TiB2 coatings induced by different incident beams
- 1 July 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 115 (1-4) , 523-527
- https://doi.org/10.1016/0168-583x(95)01495-0
Abstract
No abstract availableKeywords
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