Annealing of Ion-Implanted Layers Under the Action of Laser Radiation

• 31 December 1976
• journal article
• Published by IOP Publishing in Soviet Physics Uspekhi
• Vol. 19  (12) , 1032-1033
• https://doi.org/10.1070/pu1976v019n12abeh005380

Abstract

Keywords

• ION IMPLANTED
• IMPLANTED LAYERS
• LASER RADIATION
• ANNEALING OF ION
• ACTION