Study of outgassing of sputter-ion pump materials treated with three different cleaning procedures
- 1 June 1996
- Vol. 47 (6-8) , 723-726
- https://doi.org/10.1016/0042-207x(96)00056-5
Abstract
No abstract availableKeywords
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- Gas adsorption/desorption and materials stabilityVacuum, 1990
- Primary pressure measurements down to 10−6 PaVacuum, 1988