Secondary-ion mass analysis: Instrumentation, data interpretation, and applications
- 1 November 1974
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 11 (6) , 1093-1099
- https://doi.org/10.1116/1.1318685
Abstract
The field of secondary-ion mass analysis is discussed starting with the historical events leading up to present-day instrumentation. The two principal types of instruments are described in some detail, as well as anticipated new developments. Problems in data interpretation and quantitative treatment of data are discussed as a background for the presentation of several examples of the technique's usefulness.Keywords
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