Multichamber Rie Processing for Ingaasp Ridge Waveguide Laser Arrays
- 1 January 1991
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Passive coupling of InGaAsP/InP laser array and singlemode fibres using silicon waferboardElectronics Letters, 1991
- Reactive ion etching of III-V compounds using C 2 H 6 /H 2Electronics Letters, 1988
- Reactive ion etching of GaAs using a mixture of methane and hydrogenElectronics Letters, 1987