Surface modifications by gas cluster ion beams
- 1 December 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 106 (1-4) , 165-169
- https://doi.org/10.1016/0168-583x(95)00697-4
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Energetic cluster impacts on thin gold and tantalum filmsThe Journal of Physical Chemistry, 1986
- Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 evJournal of Applied Physics, 1961