Effects of surface roughness in inversion layer transport

• 1 January 1984
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 605-608
• https://doi.org/10.1109/iedm.1984.190794

Abstract

Keywords

• ROUGH SURFACES
• SURFACE ROUGHNESS
• SCATTERING
• ELECTRON MOBILITY
• PHONONS
• LOGIC CIRCUITS
• LOGIC DEVICES
• SOLID STATE CIRCUITS
• TEMPERATURE DISTRIBUTION
• VOLTAGE