Micromachines on the march

1 May 1994

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Spectrum

Vol. 31 (5) , 20-31
https://doi.org/10.1109/6.278394

Abstract

Miniature electromechanical sensors and actuators can be mass produced on silicon wafers much like ICs. They combine readily with signal-processing circuitry into powerful tools that measure, analyze, and control their environments. The authors describe the fabrication techniques, surface activity, atomic bonds, LIGA and SLIGA, and bury and destroy. The following applications are discussed: pressure sensors, medical equipment, industrial/consumer equipment, avionics, and mechanical applications.

Keywords

ELECTROMECHANICAL SENSORS
ACTUATORS
SILICON
CIRCUITS
SIGNAL ANALYSIS
FABRICATION
ATOMIC MEASUREMENTS
MECHANICAL SENSORS
BIOMEDICAL EQUIPMENT
AEROSPACE ELECTRONICS

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