Semiconductor substrate temperature measurement by diffuse reflectance spectroscopy in molecular beam epitaxy
- 1 May 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (3) , 1007-1010
- https://doi.org/10.1116/1.586857
Abstract
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