Thermal conductivity of thin films: Measurements and understanding
- 1 May 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (3) , 1259-1266
- https://doi.org/10.1116/1.576265
Abstract
Several techniques are reviewed with which thermal conductivity and phonon scattering can be measured in films of thicknesses ranging from angstroms to millimeters. Recent experimental results are compared critically with previous measurements. It is shown that phonons are very sensitive probes of the structural perfection of the films.Keywords
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