Pressure measurement system for beam experiments in the range 0.5–10−2 Pa
- 1 May 1979
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 16 (3) , 955-959
- https://doi.org/10.1116/1.570120
Abstract
A system for measurements of gas pressure in the range 0.5–10−2 Pa is described. A known pressure is produced by static gas expansion and compared with the pressure in a scattering cell using a capacitance manometer as the null detector. The pressure in the scattering cell is controlled by a separate dynamic expansion system. Sources of error are discussed and the absolute error is estimated to be 0.4% at 0.5 Pa, 0.5% at 0.1 Pa, and 2.3% at 10−2 Pa.Keywords
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