A model for surface layer composition changes in sputtered alloys and compounds

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Abstract
Under the assumption that extracted beam energy is quickly shared among secondary cascade members of all masses, we present a model which accounts quantitatively for recently observed equilibrium surface enrichments in heavy atoms following ion bombardment of alloys and compounds. Assuming strong radiation‐driven diffusion,effects of which are directly observed, and given the time required to reach equilibrium, we can calculate the thickness Δx of the enriched layer. Alternatively, knowing Δx, a calculation of the equilibration time constant is possible.

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