Growth and properties of sputtered zirconia and zirconia–silica thin films

• 1 April 2003
• journal article
• Published by Elsevier in Thin Solid Films
• Vol. 429  (1-2) , 40-45
• https://doi.org/10.1016/s0040-6090(03)00143-3

Abstract

Keywords

• SPUTTERING
• DIELECTRIC PROPERTIES
• STRESS
• OPTICAL PROPERTIES