Preparation of Tl2Ca2Ba2Cu3Ox Superconducting Thin Films by DC Sputtering

Abstract
Thin films of the Tl-Ca-Ba-Cu-O system were prepared by a single-target dc sputtering system on YSZ substrates with postannealing. The effects of various annealing conditions on the films were studied. It was found that under suitable conditions, the Tl2Ca2Ba2Cu3O x thin films with a zero-resistance temperature of up to 97 K could be formed by sputtering from a target of the same composition. The X-ray diffraction patterns showed that the annealed films were preferentially c-axis oriented perpendicular to the substrates. It was also found that the films were highly resistant to n-butyl acetate, acetone and water.