CMOS micromechanical resonator oscillator
- 30 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Mechanical-thermal noise in micromachined acoustic and vibration sensorsIEEE Transactions on Electron Devices, 1993
- Environmental sensitivities of quartz oscillatorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1992
- Electrostatic-comb drive of lateral polysilicon resonatorsSensors and Actuators A: Physical, 1990