New method for calculating the molecular flux from an inclined Knudsen cell
- 1 July 1990
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 8 (4) , 3327-3332
- https://doi.org/10.1116/1.576544
Abstract
A new theoretical treatment of an inclined Knudsen cell in the molecular-beam epitaxy (MBE) system is presented. Clausing’s integral equation method is generalized to obtain numerically the angular distribution, transmission probability, and film thickness distribution for the inclined cell. This treatment, which greatly reduces the calculation time as compared with conventional methods, provides optimization of the MBE system design.Keywords
This publication has 0 references indexed in Scilit: