An Apparatus for Electron Energy Analysis in Glow Discharge Plasmas
- 1 October 1972
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 43 (10) , 1475-1480
- https://doi.org/10.1063/1.1685468
Abstract
An apparatus has been designed and built for the analysis of electron energies in low temperature glow discharge plasmas. The technique involves sampling the plasma via a molecular leak and energy analyzing the electrons by a retarding potential field. Integral retarding potential curves can be plotted directly on an X-Y recorder, or the integral signal can be differentiated electronically to yield a curve which is proportional to the electron energy distribution. The characteristics of the apparatus, including its resolving power, are discussed, and some preliminary results are described.Keywords
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