New imaging technique for 64M-DRAM

• 1 June 1992
• proceedings article
• Published by SPIE-Intl Soc Optical Eng
• Vol. 1674, 741-752
• https://doi.org/10.1117/12.130364

Abstract

Keywords

• PHASE SHIFT
• HIGH RESOLUTION
• DEPTH OF FOCUS
• FIRST ORDER
• COMPUTER SIMULATION
• MASS PRODUCTION
• DESIGN RULES