Fiber-Optic Sensors Based On Resonating Mechanical Structures

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Abstract
A fiber-optic pressure sensor and a fiber-optic force sensor based on a resonating mechanical structure are developed. The accuracy and reproducibility mainly depend on the characteristics of the mechanical structure. Both structures are optically excited and the readout transducer consists of a simple optical displacement sensor, hence we have an all-optic design with its specific advantages. Further, the mechanical structure can be batch fabricated and the optic links can then be integrated with the structure. Optical transfer functions have been measured. With the proposed arrangement we obtain a signal-to-noise ratio better than 30 dB having the advantage of frequency signal transmission. The prototypes of the fiber-optic pressure sensor and the fiber-optic force sensor show the feasibility of micromechanical structures in fiber-optic sensors.© (1987) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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