A Simple Estimation of Effective Cross-Sections for Electrons to Produce O₂⁺, H⁺, B⁺and As⁺Ions in an R.F. Ion Source

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1 December 1977

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 16 (12) , 2253-2256
https://doi.org/10.1143/jjap.16.2253

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