Thin-Film Al-Al2O3-Al Capacitors
- 1 June 1965
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Parts, Materials and Packaging
- Vol. 1 (1) , 267-276
- https://doi.org/10.1109/tpmp.1965.1135364
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Some Factors Controlling Gross Leakage Currents in Sputtered Tantalum-Film CapacitorsJournal of the Electrochemical Society, 1962