Ion bombardment of polyimide films

• 1 July 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 7  (4) , 2709-2716
• https://doi.org/10.1116/1.575779

Abstract

Keywords

• POLYIMIDE
• DIANHYDRIDE
• HEAVY
• ETCHING
• ADHESION
• SPUTTERING
• STRUCTURES
• FUNCTION
• TREATMENTS