Gas Phase Etching of Sapphire

• 1 January 1968
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 115  (4) , 434-437
• https://doi.org/10.1149/1.2411246

Abstract

Keywords

• SAPPHIRE
• ALUMINIUM COMPOUNDS
• OXYGEN COMPOUNDS
• ETCHING
• GASES
• SULPHUR COMPOUNDS
• FLUORINE COMPOUNDS
• POLISHING