A full three-dimensional simulation on alpha-particle induced DRAM soft-errors
- 1 January 1985
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 496-499
- https://doi.org/10.1109/iedm.1985.191012
Abstract
Numerical device, modeling is one of the most promising VLSI device design methods developed thus for in the sub-um era. This paper describes a full three-dimensional numerical modeling of alpha-particle-induced DRAM soft-error phenomena. The three-dimensional simulation results were verified using test chip measurement in Am(241) radiation source environment. The computations agree well with experiments within 3% error whereas the two-dimensional simulation suffers from large simulation error over 70%.Keywords
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