Influence of 4H-SiC Growth Conditions on Micropipe Dissociation

• 15 October 2002
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 41  (Part 2, No) , L1137-L1139
• https://doi.org/10.1143/jjap.41.l1137

Abstract

Keywords

• SIC GROWTH
• MICROPIPE DISSOCIATION
• 4H SIC
• GROWTH CONDITIONS
• INFLUENCE OF 4H