The impact of process parameters and coating source on the properties of magnetic recording layers

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Abstract
The use of continuous ferromagnetic thin films, instead of conventional particulate media, promises an increase of data storage capacity by more than one order of magnitude. For large scale mass production, specially designed equipment, new sources, and modified deposition processes are required. The magnetic properties of the recording layers can be influenced in various ways. In evaporated CoNi video tapes the coercivity Hc is adjusted by an oblique angle of incidence during evaporation. For sputtered CoNi for rigid disks, an undesired signal modulation can be suppressed by randomizing process parameters. Perpendicular recording requires well oriented columnar crystallites prepared by the magnetron sputtering of CoCr at elevated substrate temperatures. In-line evaporation and sputtering systems enable the sequential deposition of underlayers, magnetic layers and protective layers required for long term reliability of thin film recording media.

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