Gettering of Impurities during High Dose Implantation of Al or Cr into Si and the Resulting Effect on Structure and Composition
- 1 January 1984
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Electrochemical and A.E.S. studies of FeCr surface alloys formed on AISI 52100 steel by ion beam mixingNuclear Instruments and Methods in Physics Research, 1983
- Carburization of steel surfaces during implantation of Ti ions at high fluencesJournal of Vacuum Science & Technology A, 1983
- The Influence of Implantation Conditions and Target Orientation in High Dose Implantation of Al+ into SiMRS Proceedings, 1983
- Study of Near Surface Structure and Composition for High Dose Implantation of Cr+ into SiMRS Proceedings, 1983
- Carbon-induced amorphous surface layers in Ti-implanted FeApplied Physics Letters, 1980