I n s i t u laser diagnostic studies of plasma-generated particulate contamination

• 1 July 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 7  (4) , 2758-2765
• https://doi.org/10.1116/1.576175

Abstract

Keywords

• CONTAMINATION
• LASER
• PLASMA
• PARTICULATE
• SHEATH
• BOUNDARIES
• ELECTROSTATIC
• TRAPPED
• ETCHING
• FORMATION