Composition of the oxygen plasmas from two inductively coupled sources
- 1 May 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 13 (3) , 839-842
- https://doi.org/10.1116/1.579838
Abstract
The composition of the oxygen discharges from two inductively coupled plasma sources is studied experimentally with tuned cylindrical Langmuir probes, with optical emission spectroscopy, and with a compact mass spectrometer. The data show that low frequency cylindrical discharges are highly dissociated at low neutral pressures and at high powers, whereas high frequency planar discharges have less atomic content.Keywords
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