By-product formation in spark breakdown of SF6/O2 mixtures
- 1 June 1988
- journal article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 8 (2) , 247-262
- https://doi.org/10.1007/bf01016160
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- Transfer of F− in the reaction of SF 6 − with SOF4: Implications for SOF4 production in corona dischargesPlasma Chemistry and Plasma Processing, 1988
- Identification of corona discharge-induced SF6 oxidation mechanisms using SF6/18O2/H2 16O and SF6/16O2/H2 18O gas mixturesPlasma Chemistry and Plasma Processing, 1988
- Gas-phase hydrolysis of SOF2 and SOF4The Journal of Chemical Physics, 1986
- Neutral Decomposition Products in Spark Breakdown of SF6IEEE Transactions on Electrical Insulation, 1986
- Gas phase hydrolysis of sulfur tetrafluoride: A comparison of the gaseous and liquid phase rate constantsThe Journal of Chemical Physics, 1985
- Production rates for oxyfluorides SOF2, SO2F2, and SOF4 in SF6 corona dischargesJournal of Research of the National Bureau of Standards, 1985
- Tungsten Etching in CF 4 and SF 6 DischargesJournal of the Electrochemical Society, 1984
- Dry Etching of Polyimide in O 2 ‐ CF 4 and O 2 ‐ SF 6 PlasmasJournal of the Electrochemical Society, 1983
- Profile Control of Polysilicon Lines with an SF 4 / O 2 Plasma Etch ProcessJournal of the Electrochemical Society, 1983
- ber die experimentelle Bestimmung der W rmeleitf higkeit und der elektrischen Leitf higkeit von Wasserstoff und Schwefelhexafluorid im elektrischen LichtbogenThe European Physical Journal A, 1966