Ti/TiN multilayers for hard coatings applications: in-situ characterization by real time spectroscopic ellipsometry
- 1 March 1998
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 100-101, 491-495
- https://doi.org/10.1016/s0257-8972(97)00677-4
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Mechanical properties and tribological behaviour of nanolayered Al/Al2O3 and Ti/TiN compositesSurface and Coatings Technology, 1994
- Growth, structural characterization and properties of hard and wear-protective layered materialsThin Solid Films, 1990
- Advanced layer material constitutionThin Solid Films, 1987
- Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardnessJournal of Applied Physics, 1987