The evaporation and condensation behavior of As2Se3-like materials

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Abstract
The effects of the crucible temperature and the substrate temperature on the deposition efficiency and the film compositon of As2Se3-like materials are analyzed. It is shown that the deposition efficiency increases with increasing deposition rate and decreases with increasing substrate temperature. These results are explained in terms of a model which takes the reevaporation of species from the substrate into account. This model is substantiated by the observed effects of the substrate temperature on the sticking fraction and the arsenic concentration in the film. These compositional changes can be explained by the different vapor pressures of Se-rich and As-rich vapor species, as indeed observed in mass spectrometry measurements of the equilibrium As2Se3-vapor by others.

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