Formation of ‘‘intrinsic’’ surface defects during 248 nm photoablation of polyimide
- 15 March 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 73 (6) , 3001-3008
- https://doi.org/10.1063/1.353032
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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