Two Dimensional Silicon Micromachined Optical Scanner Integrated With Photo Detector And Piezoresistor
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 293-296
- https://doi.org/10.1109/sensor.1995.717176
Abstract
The silicon micromachined optical scanner integrated with photo detectors and piezoresistor has been developed for highly miniaturized scanning type of optical sensors. The scanner is fabricated with silicon micromachining technologies including IC manufacturing methods. It is capable of scanning a light beam spot two dimensionally and photo detection with the information of where the light beam is being scanned. The scanning angle was over 40 deg. x 30 deg. and the photo sensitivity was 0.5 A/W at 680 nm wavelength.Keywords
This publication has 2 references indexed in Scilit:
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- Super-compact dual-axis optical scanning unit applying a tortional spring resonator driven by a piezoelectric actuatorPublished by SPIE-Intl Soc Optical Eng ,1991