Selective deposition of SiO2 thin films in acid baths
- 10 September 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 95 (2) , 161-166
- https://doi.org/10.1016/0040-6090(82)90238-3
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Chemical durability of Na2OCaOSiO2 glasses in acid solutionsJournal of Non-Crystalline Solids, 1975
- Phase separation in silicon oxides as seen by Auger electron spectroscopyApplied Physics Letters, 1975