Angle-resolved light scattering studies of silicon-on-sapphire
- 1 July 1987
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 84 (1) , 180-183
- https://doi.org/10.1016/0022-0248(87)90126-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Interpretation of Uv Reflectance Measurements on Silicon-On-Sapphire By Spectral Reflectance and Spectroscopic Ellipsometry StudiesMRS Proceedings, 1985
- Specular reflectance and surface roughness of silicon on sapphireJournal of Crystal Growth, 1984
- Structural Perfection Testing of Films and Wafers by Means of Optical ScannerJournal of the Electrochemical Society, 1984
- Measurement of the near-surface crystallinity of silicon on sapphire by UV reflectanceJournal of Crystal Growth, 1982