Effects of thermal annealing on superconducting Nb and NbN films
- 1 July 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 6 (4) , 2381-2385
- https://doi.org/10.1116/1.575559
Abstract
Thermal annealing in a nitrogen atmosphere degrades the superconductingproperties of sputteredNb and NbN films.Nbfilm degrades because oxygen atoms diffuse into the grain as interstitial impurities. The effect of this diffusion is suppressed in rapid thermal annealing for 10 s. NbN film degrades due to the release of nitrogen from the NbN lattice and the transformation to the ε‐NbN phase. Oxygen seems to quicken this degradation and to act as a catalyst in this transformation.Keywords
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