The absorption and atomic number corrections in electron-probe X-ray microanalysis

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Abstract
The Monte Carlo model for electron scattering described in an earlier paper has been used to calculate the absorption and back-scattering corrections met in electron-probe x-ray microanalysis. Although agreement with experimental data is on the whole good, the calculated values for the correction factors are not sufficiently accurate for general use. However, in the case of light element analysis where very high absorption corrections are needed, the corrections calculated from Monte Carlo data are the best available at present. Values for the back-scattering correction factor R calculated for incident beam angles 225° and 45° to the normal surface are given.

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