Air-Gaps for Electrical Interconnections

1 January 1999

journal article
Published by The Electrochemical Society in Electrochemical and Solid-State Letters

Vol. 1 (1) , 49-51
https://doi.org/10.1149/1.1390631

Abstract

The fabrication of air‐gap structures for electrical interconnections has been demonstrated using a sacrificial polymer encapsulated in conventional dielectric materials. The air‐gap is formed by thermally decomposing the sacrificial polymer and allowing the by‐products to diffuse through the encapsulating dielectric. The diffusivity of the polymer decomposition products is adequate at elevated temperatures to allow the formation of an air‐gap. The decomposition of a thick polymer film results in less than of residue. Electromagnetic simulation shows that the effective dielectric constant of silicon dioxide can be lowered to 2.4–2.8 for relevant structures. ©1998 The Electrochemical Society

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