Analysis of back scattered ions as a technique for the study of surfaces

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Abstract
When energetic ions strike a surface, a fraction, depending upon the ion energy and other parameters, penetrate the surface, whilst the remainder are reflected or backscattered. This review shows how studies of the energy and angular distribution of backscattered ions is being used to investigate the composition of the surface and near surface of a solid, the location of impurities in a lattice and the orientation and crystallinity of solids. The apparent limitations and prospects for development of this technique, as a precise analytical tool, are discussed.