Oxidation of Ruthenium
- 1 March 1983
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Components, Hybrids, and Manufacturing Technology
- Vol. 6 (1) , 89-92
- https://doi.org/10.1109/tchmt.1983.1136145
Abstract
Ruthenium (Ru) has been heated in air in the range of 100-400°C in order to investigate its usefulness for electrical contacts. It has been found that for temperatures up to 200°C, Ru oxidizes to produce a film which causes high contact resistance. For temperatures >300°C, Ru forms an oxide film, RuO2, which has low contact resistance. Electron spectroscopy for chemical analysis (ESCA) reveals that the oxide which forms at temperatures 300°C). More work is required to define precisely the temperature above which RuO2is the predominant species. Ru contacts in actual applications will be subjected to temperatures <100°C. This may make Ru an inappropriate contact material.Keywords
This publication has 3 references indexed in Scilit:
- Ru and RuO2 as Electrical Contact Materials: Preparation and Environmental InteractionsJournal of the Electrochemical Society, 1979
- X‐Ray Photoelectron Spectroscopic Studies of RuO2 ‐ Based Film ElectrodesJournal of the Electrochemical Society, 1978
- X-Ray photoelectron spectroscopic studies of ruthenium-oxygen surfacesJournal of Catalysis, 1974