Ellipsometric Characterization of Layers on Transparent Semiconductor Wafers
- 1 January 1991
- journal article
- research article
- Published by Wiley in Physica Status Solidi (b)
- Vol. 163 (1) , K69-K74
- https://doi.org/10.1002/pssb.2221630146
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Optical reflection and transmission through a flat system with a thick fluctuating layerPhysica Status Solidi (a), 1984
- Evaluation of Derivatives of Reflectance and Transmittance by Stratified Structures and Solution of the Reverse Problem of EllipsometryOptica Acta: International Journal of Optics, 1983