A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
- 9 January 2004
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 14 (4) , 514-521
- https://doi.org/10.1088/0960-1317/14/4/011
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Experimental characterization of stiction due to charging in RF MEMSPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switchesJournal of Micromechanics and Microengineering, 2003
- RF MEMSPublished by Wiley ,2003
- A methodology and model for the pull-in parameters of electrostatic actuatorsJournal of Microelectromechanical Systems, 2001
- RF MEMS from a device perspectiveJournal of Micromechanics and Microengineering, 2000
- Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)Sensors and Actuators A: Physical, 1998