Silicon Three-axial Tactile Sensor
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 656-659
- https://doi.org/10.1109/sensor.1995.717315
Abstract
A novel three-axial tactile sensor based on the differential capacitive principle is presented. The sensor is fabricated using IC processing and bulk micromachining technology. Normal and shear forces are detected by capacitor arrays under force mesas. Experimental devices show sensitivities of 0.13 pF/grarn to normal forces, and 0.32 pF/gram to shear forces in a force range of 0-1 gram. The spatial resolution is 2.2 mm, and the maximum dynamic response frequency is 162 Hz. The force range and sensitivity can be adjusted by changing the membrane thickness. A dynamic load range of more than 100 can be obtained using a detection circuit with a resolution of 10 fF.Keywords
This publication has 5 references indexed in Scilit:
- A flexible polyimide-based package for silicon sensorsSensors and Actuators A: Physical, 1994
- Tactile shear sensing using anisotropically conductive polymerApplied Physics Letters, 1993
- Force and Tactile Sensing for RobotsPublished by Springer Nature ,1988
- The Physiology and Psychophysics of TouchPublished by Springer Nature ,1988
- A high-performance silicon tactile imager based on a capacitive cellIEEE Transactions on Electron Devices, 1985