Process optimization of free-standing polysilicon microstructures
- 1 September 1992
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 2 (3) , 190-192
- https://doi.org/10.1088/0960-1317/2/3/017
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A simple technique for the determination of mechanical strain in thin films with applications to polysiliconJournal of Applied Physics, 1985
- Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical propertiesSensors and Actuators, 1983