MULTILAYER X-RAY MIRRORS, A FIRST STEP TOWARDS THE CUSTOM DESIGN OF NEW MATERIAL PROPERTIES
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
Soft x-ray reflectivities up to a factor 104larger than those of the best homogeneous materials have been obtained with multilayers coatings. Thickness control and boundary definition has been achieved on an atomic scale with amorphous films. We will review design, fabrication, performance and characterization of the coatings and discuss possibilities to extent these methods to the improvement of other material properties.Keywords
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