Two‐Step Oxidation Experiments to Determine Structural and Thermal History Effects in Thermally‐Grown SiO2 Films on Si
- 1 September 1990
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 137 (9) , 2825-2836
- https://doi.org/10.1149/1.2087083