Study of the Ionic Transport during Anodization by Nuclear Microanalysis and Secondary Ion Mass Spectroscopy

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Abstract
The influence of phosphorus ions incorporated from the electrolyte on the transport process during the anodic oxidation of tantalum has been investigated using nuclear microanalysis and secondary ion mass spectroscopy. The presence of a phosphorus‐rich layer in the oxide gives rise to a partial inversion of the order of the oxygen ions in the film. The results are interpreted by assuming that the oxygen ions directly linked to the phosphorus ions participate in the transport process with a probability of movement lower than the rest of the oxygen ions.

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