Laser Induced Chemical Vapor Deposition of Hydrogenated Amorphous Silicon
- 1 January 1982
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Amorphous and Liquid SemiconductorsPublished by Springer Nature ,1974
- Structural, Optical, and Electrical Properties of Amorphous Silicon FilmsPhysical Review B, 1970